杨伸勇
助理研究员所在系所：微纳工程科学研究中心
电子邮件：ysngsy@sjtu.edu.cn
教育背景
2015-09至2020-03年，上海交通大学，电子科学与技术，博士
工作经历
2023-12 至今，上海交通大学，机械与动力工程学院，助理研究员
2020-06至2022-11，上海交通大学，仪器科学与技术，博士后
研究方向
先进制程集成电路量检测设备
航空航天高温薄膜传感器
具身智能电子皮肤，生物医学传感器
COMS-MEMS芯片集成
科研项目
2019-2023年，异质集成薄膜传感器研究，国家基础加强重点项目，核心参与人员
2020-2023年，曲面基底高温薄膜传感器研究，国家重点研发计划子课题，核心参与人员
代表性论文专著
1. Wang YS ,Zhang CC, Yang SY, Yang ZQ, Ding GF, Multilayer heterogeneous electrical insulation structure of HfO2/Al2O3 for high-temperature thin-film sensor on superalloy substrate，Applied Surface Science, 642,2024, 158592.
2. Wang YS, Zhang MJ, Guo LQ, Zhang CC, Yang SY, Thin film heat flux sensor with sandwich structure for extreme temperature environment, IEEE Transactions on Electron Devices, vol. 70, 5306-5312, 2023.
3. Wang Ys, Zhang CC, Yang SY, Ding GF, In situ integration of high-temperature thin-film sensor for precise measurement of heat flux and temperature on superalloy substrate, IEEE Sensors Journal, vol. 23, 17932-17941, 2023.
4. Wang Ys, Zhang CC, Yang SY, Yang ZQ, Ding GF, Electrical insulation improvement from interface regulation for high-temperature thin-film sensors on superalloy substrate, Journal of Alloys and Compounds, 956,2023.
5. Yang SY, Zhang CC, Yang ZQ, Yao JY ,Huang MG, Wang H, Ding GF, Fabrication and piezoresistance of high temperature ITO thin film strain gauge, Cailiao Gongcheng-Journal of Materials Engineering, 2020.
6. Yang SY, Zhang CC, Chang XY, Yang ZQ, Yao JY, Wang H, Ding GF, Effect of heat treatment atmosphere on the piezoresistivity of indium tin oxide ceramic strain sensor, Ceramics International, 2019, 45. 14, 17048-17053.
7. Zhang CC, Huang JZ , Li J , Yang SY, Ding, GF, Design, fabrication and characterization of high temperature thin film heat flux sensors, Microelectronic Engineering, 2019.
8. Lin XK, Zhang CC, Yang SY, Yang ZQ, Ding GF, The impact of thermal annealing on the temperature dependent resistance behavior of Pt thin films sputtered on Si and Al2O3 substrates, Thin Solid Films, 685, 372-378, 2019.
9. Yang SY, Zhang CC, Chang XY, Yang ZQ, Yao JY, Wang H, Ding GF, Effect of nitrogen doping temperature on the resistance stability of ITO thin films, Journal of Alloys and Compounds, 778, 90-96, 2019.
10. Huang JZ , Zhang CC, Ding GF, Yang ZQ, Zhao XL, Yang SY, A High-Sensitivity Microfluidic Chip Calorimeter for Biochemical Reaction Monitoring Applications, TRANSDUCERS & EUROSENSORS XXXIII 2019, Berlin, GERMANY.
11. Yang SY, Zhang CC, Yang ZQ , Wang H, Zhao XL, Ding GF, In-Situ Self-Compensated Pt-ITO Thin Film Strain Gage With a Nanolaminated Structure, TRANSDUCERS & EUROSENSORS XXXIII 2019, Berlin, GERMANY.
12. Yang SY, Li HF, Yao JY, Yang ZQ, Zhang CC, Wang H , Ding GF, Effect of Al2O3/Al bilayer protective coatings on the high-temperature stability of PdCr thin film strain gages, Journal of Alloys and Compounds, 759, 1-7,2018.
13. Yang SY, Zhang CC, Wang H, Ding GF, An In-Situ Prepared Synchronous Self-Compensated Film Strain Gage For High Temperature, MEMS 2017.
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地址：上海市东川路800号上海交通大学闵行校区机械与动力工程学院
邮编：200240
Email：sjtume@sjtu.edu.cn